- The nitrogen generated in the plant will be used in various processes of the semiconductor company
- It will also be supplied through pipeline to existing customers in the industrial park
Industrial gas giant Linde has started a new Spectra high purity nitrogen generator plant in Shanghai, China to support the expansion of a leading semiconductor manufacturer in the ZhangJiang Hi-tech Park located in Shanghai too. The new plant has been installed and will be operated by Linde’s joint venture Linde LienHwa (LLH).
The company said that the nitrogen generated in this plant will be used extensively in the new semiconductor fabrication plant supporting direct production process applications and general purging and of semiconductor manufacturing systems. The nitrogen will also be supplied through pipeline to existing customers in the industrial park says Linde.
Stan Tang, LLH China president, said that the company has worked closely with its customers to expand the high purity gases infrastructure required for their advanced wafer processing facilities
